Extended characterization of the stress fields in the heteroepitaxial growth of 3C-SiC on silicon for sensors and device applications
Academic Article
Publication Date:
2012
Iris type:
01.01 Articolo in rivista
List of contributors:
Anzalone, Ruggero; Camarda, Massimo; Piluso, Nicolo'; LA MAGNA, Antonino; LA VIA, Francesco
Published in: