MASS-SPECTROMETRIC STUDIES OF SOME NEW HAFNOCENE DIALCOHOLATES

The electron ionization mass spectrometric behaviour of a new class of hafnocene dialcoholates, and, for comparison, of hafnocene dichloride, is discussed. They are also compared on the basis of mass-analysed ion kinetic energy spectrometry. Fragmentation patterns of oxygen-containing species give relevant information on their potential as precursors for the deposition of HfO2 thin films via metal-organic chemical vapour deposition.