Publication Date:
1983
abstract:
ZnO piezoelectric thin films for integrated acousto-optic applications have been deposited on fused quartz and 7059 Corning glass by means of a conventional r. f. diode sputtering. The structures of the films have been analyzed by X-ray diffraction and scanning electron microscope. The good quality of the ZnO films allowed the realization of SAW transducers and planar optical waveguides.
Iris type:
01.01 Articolo in rivista
Keywords:
otica integrata; acusto-ottica; SAW; sputtering; X-ray
List of contributors:
Lagomarsino, Stefano; Verona, Enrico
Published in: