Data di Pubblicazione:
1983
Abstract:
ZnO piezoelectric thin films for integrated acousto-optic applications have been deposited on fused quartz and 7059 Corning glass by means of a conventional r. f. diode sputtering. The structures of the films have been analyzed by X-ray diffraction and scanning electron microscope. The good quality of the ZnO films allowed the realization of SAW transducers and planar optical waveguides.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
otica integrata; acusto-ottica; SAW; sputtering; X-ray
Elenco autori:
Lagomarsino, Stefano; Verona, Enrico
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