Characterization of lattice defects in ion-implanted silicon

Chapter
Publication Date:
1996
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/203406
Book title:
X-RAY AND NEUTRON DYNAMICAL DIFFRACTION: THEORY AND APPLICATIONS
Published in:
NATO ASI SERIES. SERIES B: PHYSICS
Series