Deposition and characterization of B4C/CeO2 multilayers at 6.x nm extreme ultraviolet wavelengths

Academic Article

Publication Date:

2016

abstract:

[object Object]

Iris type:

01.01 Articolo in rivista

Keywords:

deposition; multilayers

List of contributors:

Authors of the University:

GIGLIA ANGELO

Handle:

Published in:

Journal

URL