BORON AND PHOSPHORUS ION IMPLANTATION IN A-SIXC1-XH THIN FILMS

Conference Paper

Publication Date:

1994

abstract:

Iris type:

04.01 Contributo in Atti di convegno

Keywords:

a-SiC:H thin films; boron doping; phosphorus doping; ion implantation

List of contributors:

Authors of the University:

RIZZOLI RITA

SUMMONTE CATERINA

Handle:

Book title:

AMORPHOUS SILICON TECHNOLOGY-1994

Published in:

Journal