Theoretical and experimental investigation of PSAW and SAW properties of AlN films on isotropic diamond substrates

Conference Paper
Publication Date:
2005
abstract:
[object Object]
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
Aluminum nitride; Diamond films; Electro-acoustic devices; SAW and PSAW propagation
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/278175
Published in:
PROCEEDINGS-IEEE ULTRASONICS SYMPOSIUM
Series