Process dependence of doped polysilicon thermal conductivity for thermal MEMS applications

Conference Paper

Publication Date:

2006

Iris type:

04.01 Contributo in Atti di convegno

List of contributors:

Mancarella, Fulvio; Cristiani, Stefano; Roncaglia, Alberto; Severi, Maurizio; Cardinali, GIAN CARLO

Authors of the University:

CRISTIANI STEFANO

MANCARELLA FULVIO

RONCAGLIA ALBERTO

Handle:

https://iris.cnr.it/handle/20.500.14243/73006