Effects of V and Cr addition on the structural and sensing properties of titania

We have comparatively studied the addition of Cr and V in titania. Cr and V content were changed by means of insets placed in the Ti target. Structural, compositional and electrical analyses of different series of thin films, made by XRF, XRD, are presented. Electrical characterization not only showed that Cr doped layers were very sensitive to ethanol within a useful range for applications, but also allowed to verify that the electrical behaviour is dependent on the structure of film. Finally, the Cr and V concentrations that gives the best results in terms of sensing performances has been determined and a correlation between structural and electrical measurement has been evidenced.