Microstructure and current transport in Ti/Al/Ni/Au ohmic contacts to n-type AlGaN epilayers grown on Si(111)
Academic Article
Publication Date:
2006
abstract:
The microstructure and the current transport in Ti/Al/Ni/Au ohmic contacts on AlGaN were investigated in this paper.
Iris type:
01.01 Articolo in rivista
Keywords:
AlGaN; ohmic contacts; Ti/Al/Ni/Au; C-AFM
List of contributors:
Roccaforte, Fabrizio
Published in: