Study of cerium dioxide thin films by X-ray Photoelectron Spectroscopy

X-ray photoelectron spectroscopy measurements of cerium dioxide thin films have been performed. The samples were prepared by chemical vapor deposition (CVD) using Ce(dpm)4 (Hdpm = 2,2,6,6- tetramethyl-3,5-heptanedione) as precursor on alumina and glass substrates. In this work, the spectra of the principal core levels for a CeO2 film on glass are presented. The Ce 3d photopeak has the typical structure of Ce(IV) compounds. By deconvolution of the O 1s signal, the presence of -OH groups and adsorbed water are evidenced. Sputtering treatments confirm that carbon contamination is limited to the outermost layers, while resulting hydrated species are bonded tenaciously to the oxide network.