SiC Films and Coatings: Amorphous, Polycrystalline, and Single Crystal Forms

Chapter
Publication Date:
2012
abstract:
A broad review of the different forms of 3C-SiC on silicon is presented in this chapter.
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
silicon carbide; CVD growth
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/305589