Study of the effects of growth rate, miscut direction and postgrowth argon annealing on the surface morphology of homoepitaxially grown 4H silicon carbide films
Academic Article
Publication Date:
2013
Iris type:
01.01 Articolo in rivista
List of contributors:
Camarda, Massimo; LA MAGNA, Antonino; LA VIA, Francesco; Fiorenza, Patrick; Privitera, STEFANIA MARIA SERENA
Published in: