Dielectric and Semiconductor Membranes as Support for Lumped Elements and Coplanar Waveguides
Conference Paper
Publication Date:
1997
abstract:
Optimum non-selective etching solutions for obtaining GaAs membranes have been studied.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
GaAs; Micromachining
List of contributors:
Marcelli, Romolo
Book title:
Proceedings of the 8th Micromechanics Europe Workshop, MME'97