Post-growth process effect on hetero-epitxial 3C-SiC wafer bow and residual stress

Academic Article
Publication Date:
2013
Iris type:
01.01 Articolo in rivista
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/181126
Published in:
MATERIALS SCIENCE FORUM
Series