Meander and S Line Inductors on Thin Dielectric Membranes Manufactured by Anisotropic and Isotropic Etching of Silicon
Conference Paper
Publication Date:
1998
abstract:
The fabrication of Meander and S Line Inductors on Thin Dielectric Membranes Manufactured by Anisotropic and Isotropic Etching of Silicon is presented together with microwave measurements
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; Microwaves; Lumped Components
List of contributors:
Marcelli, Romolo
Book title:
Proceedings of the 9th Micromechanics Europe, MME'98