Meander and S Line Inductors on Thin Dielectric Membranes Manufactured by Anisotropic and Isotropic Etching of Silicon
Contributo in Atti di convegno
Data di Pubblicazione:
1998
Abstract:
The fabrication of Meander and S Line Inductors on Thin Dielectric Membranes Manufactured by Anisotropic and Isotropic Etching of Silicon is presented together with microwave measurements
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; Microwaves; Lumped Components
Elenco autori:
Marcelli, Romolo
Link alla scheda completa:
Titolo del libro:
Proceedings of the 9th Micromechanics Europe, MME'98