Hydrocarbon and Fluorocarbon Thin Film Deposition in Atmospheric Pressure Glow Dielectric Barrier Discharges

Chapter
Publication Date:
2008
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/221949
Book title:
Advanced Plasma Technology