Publication Date:
2001
abstract:
The aim of this work is to present performances of a miniaturised, silicon membrane supported, straight edge resonator. S11 and S21 parameters of this device are presented for different magnetic bias fields, exhibiting frequency tunability between 2 GHz and 7.5 GHz. The use of silicon membranes to support these devices offers important openings toward the integration of magnetostatic wave devices with micromachined structures.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
Magnetostatic Waves; Resonators; Tunability
List of contributors:
Marcelli, Romolo
Book title:
Proceedings of the 12th Micromechanics Europe Workshop, MME '01