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Tunable SER on Microprocessed Silicon Membrane and on Silicon Bulk

Contributo in Atti di convegno
Data di Pubblicazione:
2001
Abstract:
The aim of this work is to present performances of a miniaturised, silicon membrane supported, straight edge resonator. S11 and S21 parameters of this device are presented for different magnetic bias fields, exhibiting frequency tunability between 2 GHz and 7.5 GHz. The use of silicon membranes to support these devices offers important openings toward the integration of magnetostatic wave devices with micromachined structures.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
Magnetostatic Waves; Resonators; Tunability
Elenco autori:
Marcelli, Romolo
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/201598
Titolo del libro:
Proceedings of the 12th Micromechanics Europe Workshop, MME '01
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