Electrodeposition of In + As thin film alloys and their conversion to InAsxP1-x by PH3 treatment

The codeposition of In+As alloys has been investigated as a preliminary step for the preparation of thin polycrystalline InAs and InAsxP1-x films. Alloys of composition ranging from large excess In to excess As could be obtained by a suitable choice of bath and deposition conditions. Stoichiometric 1:1 deposits have been converted to InAs by simple thermal treatment. In+As alloys with excess In annealed under PH3 flow resulted in deposits consisting of two phases, an InAsxP1-x phase with x in the range 0.25 to 1 and and almost pure InP. Photoelectrochemical investigations showed that only the latter species was photoactive.