Role of C and Ge in the electrical activation of In implanted in Silicon.

Conference Paper
Publication Date:
2004
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/159819
Book title:
SILICON FRONT-END JUNCTION FORMATION-PHYSICS AND TECHNOLOGY