Growth kinetics of a displacement field in hydrogen implanted single crystalline silicon

Academic Article
Publication Date:
1998
Iris type:
01.01 Articolo in rivista
Keywords:
ROCKING-CURVE ANALYSIS; ANNEALING TREATMENTS; DEFECTS
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/212960
Published in:
JOURNAL OF APPLIED PHYSICS
Journal