Calibration in cryogenic conditions of deposited thin-film thermometers on quartz crystal microbalances

This work deals with temperature characterization of Cr-Au and Ti-Au deposited resistors on quartz crystal microbalances designed for Space. The advantage of the proposed configuration is that direct heating of the electrode's area can be obtained as well as a measurement of the quartz crystal temperature. In this view, characterization of the deposited materials is of primary importance to provide accurate temperature measurement and retrieve reliable results for thermogravimetric analyses. The behavior of the deposited material has been verified down to cryogenic temperatures. The characterization in cryogenic condition evidenced that the linearity error is limited to 4 °C at the liquid nitrogen temperature but the regression standard deviation can be reduced to one order of magnitude if a third-order polynomial is used to fit the experimental data.