DOUBLE-CRYSTAL X-RAY-DIFFRACTION FROM PERIODICALLY CORRUGATED CRYSTALLINE SEMICONDUCTOR SURFACES

In this work we present a diffraction model that allows us to calculate the double-crystal x-ray diffraction pattern of corrugated surfaces. The model is based on a semidynamical x-ray diffraction theory, where the dynamical theory is used in order to describe the diffraction of the substrate crystal, while the kinematical theory is used to describe the x-ray diffraction of the surface grating. The interface between different parts of the periodic surface array is described by using the multiple-slit Fraunhofer formalism. Our x-ray diffraction model is used to simulate the experimental (400) and (422) reflection patterns of corrugated (100) GaAs surfaces.