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Growth and resistivity of Pt films obtained from Pt(acac)2 via MOCVD in the presence of water vapor
Conference Paper
Publication Date:
2005
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Battiston, Giovanni; Gerbasi, Rosalba; Battiston, Simone
Handle:
https://iris.cnr.it/handle/20.500.14243/431226
