New silicon technologies enable high-performance arrays of Single Photon Avalanche Diodes

In order to fulfill the requirements of many applications, we recently developed a new technology aimed at combining the advantages of traditional thin and thick silicon Single Photon Avalanche Diodes (SPAD). In particular we demonstrated single-pixel detectors with a remarkable improvement in the Photon Detection Efficiency at the longer wavelengths (e. g. 40% at 800nm) while maintaining a timing jitter better than 100ps.