Si-based materials for advanced microelectronic devices: Synthesis, defects and diffusion

Chapter
Publication Date:
2006
Iris type:
02.02 Prefazione/Postfazione
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/200920
Book title:
Si-based Materials for Advanced Microelectronic Devices: Synthesis, Defects and DiffusionProceedings of the E-MRS IUMRS ICEM 2006 Spring Meeting - Symposium U: Si-based Materials for Advanced Microelectronic Devices: Synthesis, Defects and Diffusion, E-MRS IUMRS ICEM 2006 Symposium U Nice, France 29 May-2 June 2006
Published in:
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Journal