Si-based materials for advanced microelectronic devices: Synthesis, defects and diffusion
Capitolo di libro
Data di Pubblicazione:
2006
Tipologia CRIS:
02.02 Prefazione/Postfazione
Elenco autori:
Napolitani, Enrico
Link alla scheda completa:
Titolo del libro:
Si-based Materials for Advanced Microelectronic Devices: Synthesis, Defects and DiffusionProceedings of the E-MRS IUMRS ICEM 2006 Spring Meeting - Symposium U: Si-based Materials for Advanced Microelectronic Devices: Synthesis, Defects and Diffusion, E-MRS IUMRS ICEM 2006 Symposium U Nice, France 29 May-2 June 2006