Development of a test-bed based on electronic board for the fatigue characterization of electrostatically actuated microstructures

Under operating conditions, several microdevices are cyclically stressed by mechanical loading. The characterization of long-term durability plays therefore a leading role in MEMS reliability. The application of fatigue test shows several difficulties. A great amount of instruments are required, like power generators, spectrum analyzers and CCD cameras. Since measurements can take several months, the parallel acquisition is also desirable. This paper addresses the development of a test-bed based on an electronic board suitable for the fatigue characterization of electrostatically actuated devices. The sample operation is monitored based on the drop in the sinusoidal current. The methodology takes advantages of electrical measurements; the use of on-chip test design can be exploited as well as the batch characterization.