Vanadium oxides thin films from vanadyl precursors

A sereies of vanadyl complexes of general formula VO(L)2 where L is a beta-diketonate ligand are used as precursors for the synthesis of vanadium oxides thin films by CVD. The depositions, carried out on Alpha-Al2O3 in O2 or N2 atmospheres, lead to films mainly composed of VO2. The influcence of different ligands and synthesis conditions on the composition, microstructure and morphology of the samples is studied by XPS, Raman, XRD and AFM. The Thermal decomposition of the precursors is investigated by Mass Spectrometry.