Experimental characterization of a novel single chip flow sensor with automatic compensation of pressure effects

A smart flow sensor fabricated on a single chip with a commercial CMOS process followed by a post-processing technique is characterized. The sensing structures are micro-calorimeters made up of two heaters placed between an upstream and a downstream temperature probe. The integrated read-out electronics performs the automatic compensation of intrinsic offset and pressure effects. The effectiveness of the proposed correction methods is verified in nitrogen at room temperature.