Study of Zr1-xSnxTiO4 thin films prepared by polymeric precursor route

Zirconium-stannate titanate Zr1-xSnxTiO4 (ZTS) thin films, undoped and doped with Sb, Ta and Nb, were prepared by a polymeric precursor technique. The ZTS films were deposited on the multilayered substrates (Pt/Ti/SiO2/Si) by means of multiple spin-coating. After this deposition, the samples were heated at different temperatures (300-700degreesC). The chemical composition of these films and bulk ZTS samples was investigated by using x-ray photoelectron spectroscopy and selected-area XPS depth profiling. A partial surface segregation of Sn-IV and the presence of Sn-0, Ti-II and Ti-III species in the films were revealed from XPS depth profiles. An optimized ZTS deposition process, where an oxidizing agent (H2O2) is added to the gel, is proposed.