Publication Date:
1993
abstract:
Dislocations induced by high SEM beam currents in GaAs were studied by TEM and emission CL. They were found to consist of bowed segments and confirmed to have [001] Burgers vectors. The capacity of different SEMs to induce dislocations varied greatly. Methods for recording CL contrast profiles and a Monte Carlo based program for CL calculations are presented.
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Lazzarini, Laura; Salviati, Giancarlo
Published in: