BEAM-INDUCED DISLOCATIONS AND THEIR CL CONTRAST

Dislocations induced by high SEM beam currents in GaAs were studied by TEM and emission CL. They were found to consist of bowed segments and confirmed to have [001] Burgers vectors. The capacity of different SEMs to induce dislocations varied greatly. Methods for recording CL contrast profiles and a Monte Carlo based program for CL calculations are presented.