Gas phase vibrations as a tool for the characterisation of CVD precursors and processes

In-situ, or in-line Fourier transform infrared (FT-IR) spectroscopy can play an important role in the understanding of CVD processes, and some examples are reported. Moreover, gas phase composition analysis has been shown to be a valid tool for the characterization of precursor volatility and evaporation rate under a wide range of experimental conditions.