Summary of IAEA intercomparison of IBA software

The International Atomic Energy Agency has sponsored a formal intercomparison exercise for the seven depth profiling ion beam analysis codes, which are: GISA, RUMP, RBX, DEPTH, DataFurnace, SIMNRA and MCERD. This intercomparison is published in Nucl. Instr. and Meth. B [N.P. Barradas, K. Arstila, G. Battistig, M. Bianconi, N. Dytlewski, C. Jeynes, E. Kotai, G. Lulli, M. Mayer, E. Rauhala, E. Szilagyi, M. Thompson, Nucl. Instr. and Meth. B 262 (2007) 281-303] and summarised here. The codes implement all known physical effects and they are all evaluated. We demonstrate that there is agreement between codes often better than 0.1%; and also detailed agreement with real spectra, showing in particular that the SRIM 2003 stopping powers for Si are correct to 0.6% for 1.5 MeV He. For the case of heavy ion elastic recoil detection (HI-ERD) the single scattering codes performed poorly for scattered particles, although recoiled particles were calculated correctly. (C) 2007 Elsevier B.V. All rights reserved.