Quasi-epitaxial growth of crystalline wurtzite AlN thin films on Si(100) by RF magnetron sputtering
Conference Poster
Publication Date:
2009
Iris type:
04.03 Poster in Atti di convegno
List of contributors:
Imperatori, Patrizia; Scavia, Guido; Caliendo, Cinzia
Book title:
2009 IEEE International Ultrasonics Symposium (IUS) and Short Courses