Calibration Protocol for Broadband Near-Field Microwave Microscopy

In this paper, we describe how to define and build a set of known loads to be used in near-field microwave microscopy. Such loads are necessary to set up a microwave calibration kit, enabling local quantitative measurements by the microscope. The proposed protocol is validated through the microscopy system we have recently developed that combines a scanning tunneling microscope and a 70-GHz vector network analyzer.