First realization and characterization of multilayer EUV reflective coatings

Conference Paper
Publication Date:
2001
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/239266
Book title:
Soft X-Ray and EUV Imaging Systems II
Published in:
PROCEEDINGS OF SPIE
Series