Internal Gettering Efficiency in p/p+ and p/p- Silicon Epistructures

Abstract

Publication Date:

2003

Iris type:

04.02 Abstract in Atti di convegno

Keywords:

Si; gettering; annealing; EBIC

List of contributors:

Frigeri, Cesare; Gombia, Enos

Handle:

https://iris.cnr.it/handle/20.500.14243/95395