Quantitative estimation of the threefold and fourfold carbon coordination in amorphous CNx films

Reflection electron energy loss spectroscopy and x-ray photoemission spectroscopy results obtained from laser-ablated amorphous CN x thin films have been analyzed in order to quantitatively deduce the change of the threefold/fourfold carbon coordination ratio induced by the nitrogenation. It has been found that nitrogenation induces an increase of the threefold-coordinated carbon atoms with respect to the fourfold-coordinated ones, evidencing the graphitization of the material. All the bond concentrations of the threefold and fourfold coordinations have been evaluated.