Glow Dielectric Barrier Discharges for Deposition of Fluorocarbon Thin Films

Conference Paper
Publication Date:
2006
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/53853
Book title:
18th Europhysics Conference on the Atomic and Molecular Physics of Ionised Gases
Published in:
EUROPHYSICS CONFERENCE ABSTRACTS
Series