SU-8 based Processes for the Realization of RF MEMS Structures

Chapter
Publication Date:
2010
abstract:
The utilization of negative resisit SU-8 for manufacturing RF MEMS switches has been studied.
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
RF MEMS; SU-8; Polymers
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/449539
Book title:
Microwave and Millimeter Wave MEMS