Boron and phosphorus quantification in sol-gel BPSG glasses by XPS

Monolithic borophosphosilicate glasses (BPSG) were prepared by the sol-gel route through xerogel densification. Tetramethoxysilane (Si(OCH3)4), trimethylborate (B(OCH3)3) and trimethylphosphite (P(OCH3)3) were used as source compounds for Si, B and P respectively. After gel drying, samples underwent thermal treatment up to 700°C, resulting in transparent and crack-free monolithic glasses. In this work, X-ray Photoelectron Spectra of a representative glass specimen are presented and discussed. Beside the wide scan spectrum, a detailed analysis of Si2p, O1s, P2p, B1s+P2s is performed. Moreover, a quantification procedure aimed at resolving problems arising from the overlap between B1s and P2s photopeaks in oxide-based systems is proposed.