Electron energy distribution functions and rate and transport coefficients of H2/H/CH4 reactive plasmas for diamond film deposition

Academic Article
Publication Date:
1996
Iris type:
01.01 Articolo in rivista
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/219430
Published in:
PLASMA CHEMISTRY AND PLASMA PROCESSING
Journal