Subtracting technologies: Unconventional Nanolithography

Chapter
Publication Date:
2020
abstract:
Subtracting technologies: Unconventional Nanolithography
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
Nanofabrication patterning; Subtractive lithography; Unconventional lithography
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/437847