Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates

Lead zirconate titanate (PZT) thin films were deposited by rf magnetron sputtering on Pt/Ti/SiO 2//Si, Au/Ti/SiO2//Si, ITO//glass electrodes and on Si (100) substrates. As deposited films show large excesses of Pb and O and contain different Pb oxides. Annealing treatments in air at 650 and 750 °C carried out in a preheated muffle furnace lead to a decrease of Pb and O content and to formation of the perovskite phase via an intermediate nanocrystalline pyrochlore phase. Phase pure perovskite films are obtained on Pt and ITO electrodes by annealing at 750 °C for ~10 min, while for the same treatment significant amounts of pyrochlore remained on Au electrodes and on Si substrates.