A simple model to study the perovskite phase formation of SrTiO3 deposited by pulsed laser ablation

A simple model to study the SrTiO3 perovskite phase formation as a function of the growth parameters by pulsed laser ablation deposition technique has been reported. This model takes into account mainly the equilibrium between the oxygen density and the density characteristic of the pulsed laser deposition (PLD) system. From the critical oxygen concentration of 0.6 for the SrTiO3 phase, the experimental parameters such as chamber partial pressure and substrate temperature were tailored according to model by adjusting the optimum growth conditions. The critical experimental parameters during the growth were determined: 0.1 mbar of the oxygen pressure and 750 °C of the substrate temperature.